Effects of germanium on oxygen precipitation in heavily boron - doped czochralski silicon 锗对重掺硼直拉硅中氧沉淀的影响
Oxygen precipitation characterization of silicon wafers by measurement of interstitial oxygen reduction 硅片氧沉淀特性的测定-间隙氧含量减少法
Test methods for oxygen precipitation characterization of silicon wafers by measurement of interstitial oxygen reduction 通过测量间隙氧含量的减少表征硅片氧沉淀特性的方法
Finally , the effect of rapid thermal process ( rtp ) on oxygen precipitation in hb is investigated in this paper 最后文章还系统研究了快速热处理( rtp )对重掺硼硅单晶中氧沉淀的影响。
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